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Horizontal LPCVD

Deposition of tunnel oxide layer, i-Poly and D-poly for TOPCon solar cells.
Horizontal PECVD (Poly-Si)

Deposition of tunnel oxide layer, i-Poly and D-poly for TOPCon solar cells.
Horizontal PECVD (Two-In-One)

AlOx+SiN deposition.
Horizontal PECVD

Depositionof SiN, SiON ,etc.
Horizontal PEALD (A&P)

AlO+SiN Thin-film Deposition.
Horizontal Low Pressure Phosphorus Diffusion Equipment

Low pressure phosphorus diffusion & doping.
Horizontal Low Pressure Boron Diffusion Equipment

Low pressure, high temperature boron diffusion & doping.
Horizontal Low Pressure Oxidation/Annealing Equipment

Low Pressure oxidation, annealing.