É豸Ãû³Æ Equipment name

¹ÜʽµÍѹÅðÀ©É豸  Horizontal Low Pressure Boron Diffusion Equipment

É豸ÐͺŠEquipment Model

DOA-420/DOA-420L/DOA-420MAX

É豸ÓÃ; Equipment Application

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Low pressure, high temperature boron diffusion & doping.

¼¼ÊõÌØµã  Features 

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Matured BBr3 liquid source & BCL3 gas source control and delivery technology.

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Patented technology..

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Unique double-layer-nested furnace door structure.

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High-speed and stable integral module boat pushing mechanism.

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Intelligent automatic control.

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MES software with independent intellectual property rights.

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Matching S.C smart production management system.

É豸²ÎÊý  Parameters