É豸Ãû³Æ Equipment name

¹ÜʽµÍѹÁ×À©É豸  Horizontal Low Pressure Phosphorus Diffusion Equipment

É豸ÐͺŠEquipment Model

DOA-400/DOA-400L

É豸ÓÃ; Equipment Application

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Low pressure phosphorus diffusion & doping.

¼¼ÊõÌØµã  Features 

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Technical solutions for high sheet resistance.

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Unique double-layer-nested furnace door structure,free from metaphosphoric acid problem at the urnace mouth effectively.

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Unique temperature zone setting which guarantees the uniformity of sheet resistance at the furnace mouth and end effectively.

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High-speed and stable integral module boat pushing mechanism.

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Intelligent automatic control.

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MES software with independent intellectual property rights.

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Matching S.C smart production management system.

É豸²ÎÊý  Parameters